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Long-term laser durability testing of optical coatings and thin films for 157-nm lithography

Author(s):
Liberman, V. ( MIT Lincoln Lab. (USA) )
Rorhschild, M.
Palmacci, S.T.
Efremow, N.N.
Sedlacek, J.H.C.
Grenville, A. ( Intel Corp. (USA) )
1 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. Year:
2002
Vol.:
Part One
Page(from):
568
Page(to):
575
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

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