Blank Cover Image

Attainable road to the lower-k1 extension using high-transmittance attenuated phase-shifting mask in the KrF lithography world

Author(s):
Kim, I.-S. ( Samsung Electronics Co., Ltd. (Korea) )
Jung, S.-G.
Kim, H.-D.
Yeo, G.-S.
Shin, I.-K.
Lee, J.-H.
Cho, H.-K.
Moon, J.-T.
3 more
Publication title:
Optical Microlithography XV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4691
Pub. Year:
2002
Vol.:
Part One
Page(from):
466
Page(to):
475
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444370 [0819444375]
Language:
English
Call no.:
P63600/4691
Type:
Conference Proceedings

Similar Items:

Park,J., Yeo,G., Kim,I., Kim,B.-S., Lee,J., Cho,H., Moon,J.T.

SPIE-The International Society for Optical Engineering

Cho, W.-I., Yeo, G., Moon, S.-Y., Yoon, H.-S., Sohn, J.-M.

SPIE-The International Society for Optical Engineering

Kim,E., Hong,S., Moon,S., Kim,Y., Yoon,H., No,K.

SPIE - The International Society for Optical Engineering

Yoon,S.-Y., Cha,H.-S., Choi,S.-J., Jung,S.-M., Choi,S.-S., Jeong,S.-H.

SPIE-The International Society for Optical Engineering

Eom, T.-S., Lim, C.-M., Kim, S.-M., Kim, H.-B., Oh, S.-Y., Ma, W.-K., Moon, S.-C., Shin, K.S.

SPIE-The International Society for Optical Engineering

Lu, Z. G., Cui, Y., Thomas, A. C., Mansfield, S. M., Kunkel, G., Dobuzinsky, D., Zach, F. X., Liu, D., Chen, K. -J. R., …

SPIE - The International Society of Optical Engineering

Kim,I.-S., Kim,B.-S., Lee,J.-H., Cho,H.-K., Moon,J.-T.

SPIE-The International Society for Optical Engineering

Choi,E., Kim,E., Kim,H., Kim,Y., Tian,H., No,K.

SPIE-The International Society for Optical Engineering

Ham,Y.-M., Kim,S.-M., Kim,S.-J., Bae,S.-M., Kim,Y.-D., Baik,K.-H.

SPIE-The International Society for Optical Engineering

Koo,C.-K., Choo,L.-C., Lin,Q., Tan,S.-S., Lee,H.-J., Tam,S.-C., See,A.

SPIE-The International Society for Optical Engineering

Koo,S.-S., Hur,I.-B., Koo,Y.-M., Baik,K.-H., Choi,I.-H., Kim,L.-J., Park,K.-T., Shin,C.

SPIE - The International Society for Optical Engineering

Lee, D.-Y., Kim, I.-S., Jung, S.-G., Jung, M.-H., Park, J.-O., Oh, S.-H., Woo, S.-G., Cho, H.-K., Moon, J.-T.

SPIE - The International Society of Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12