Advanced hybrid optical proximity correction system with OPC segment library and model-based correction module
- Author(s):
Kotani, T. ( Toshiba Corp. (Japan) ) Kobayashi, S. Ichikawa, H. ( Toshiba Microelectronics Corp. (Japan) ) Tanaka, S. ( Toshiba Corp. (Japan) ) Watanabe, S. Inoue, S. - Publication title:
- Optical Microlithography XV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4691
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 188
- Page(to):
- 195
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444370 [0819444375]
- Language:
- English
- Call no.:
- P63600/4691
- Type:
- Conference Proceedings
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