Integration of UTR processes into MPU IC manufacturing flows
- Author(s):
Cobb, J.L. ( Motorola (USA) ) Dakshina-Murthy, S. ( AMD/Motorola Alliance (USA) ) Parker, C. ( Motorola (USA) ) Luckowski, E. Martinez, A.M. Peters, R.D. Wu, W. Hector, S.D. - Publication title:
- Advances in Resist Technology and Processing XIX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4690
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 277
- Page(to):
- 286
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444363 [0819444367]
- Language:
- English
- Call no.:
- P63600/4690
- Type:
- Conference Proceedings
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