Spectroscopic CD metrology for sub-100-nm lithography process control
- Author(s):
- Mieher, W.D. ( KLA-Tencor Corp. (USA) )
- Dziura, T.G.
- Chen, X.
- DeCecco, P.
- Levy, A.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 957
- Page(to):
- 965
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
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