Advanced process control of overlay with optimal sampling
- Author(s):
- Garvin, C. ( KLA-Tencor Corp. (USA) )
- Chen, X.
- Hankinson, M.
- Publication title:
- Metrology, Inspection, and Process Control for Microlithography XVI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4689
- Pub. Year:
- 2002
- Vol.:
- Part Two
- Page(from):
- 817
- Page(to):
- 825
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444356 [0819444359]
- Language:
- English
- Call no.:
- P63600/4689
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Optimization of high order control ,including overlay, alignment, and sampling
Society of Photo-optical Instrumentation Engineers |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Overlay excursion management through sample plan optimization and cycle time reduction
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
The novel advanced process control to eliminate AlCu-PVD induced overlay shift
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Implementation and benefits of advanced process control for lithography CD and overlay
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Automated method for overlay sample plan optimization based on spatial variation modeling
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Supersparse overlay sampling plans: an evaluation of methods and algorithms for optimizing overlay quality control and metrology tool throughput
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Software Applications Integration in the Process Industries-An Industry-Standard Approach
American Institute of Chemical Engineers |