Blank Cover Image

Implementing fully automatic macro dafect datection and classification system in high-production semiconductor fab

Author(s):
Lee, L. ( Tokyo Electron America, Inc. (USA) )
Pham, M.
Pham, D. ( ISOA Inc. (USA) )
Khaja, M.
Hennessey, K.A.
Miller, J. ( Texas Instruments Inc. (USA) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. Year:
2002
Vol.:
Part Two
Page(from):
783
Page(to):
789
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Implementing Multiple ADC Systems in a High Production Sub-Half Micron Microprocessor Fab

Kirsch,T., Webb,C.W., Hemessey,K., Kinikoglu,P., Phaom,D., Soenksen,D.

SPIE - The International Society for Optical Engineering
7 Conference Proceedings Productivity and yield improvement through implementation of automated defect review SEM at 45° column tilt in a high-capacity production Fab

Tan, J., Kulkarni, S., Ng, S.L., Jain, A., Srinivasan, V., Raccah, N., Rotlevi, O.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Knowledge-based software system for fast yield-loss detection in a semiconductor fab

Martin,V., Recio,M., Merino,M.A., Moreno,J., Fernandez,A., Gonzalez,G., Sanchez,G., Barrios,L.J., del Castillo,M.D., …

SPIE-The International Society for Optical Engineering
8 Conference Proceedings High-resolution reticle inspection technique providing a complete reticle qualification solution in advanced 90-nm node wafer fabs

Liu, L., Liao, C.-H., Dai, Y.-M., Lin, J.-C., Bhattacharyya, K., Huang, Y.-T., Son, K., Wang, D.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Wafer-level fault detection and classification on a photo track in a high volume fab

Jackson, T.L., Markle, R.J., Miller, C.W., Stewart, E.C., Crowell, R.A.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Semiconductor Analysis And the 21st Century Fab

Dziobkowski, C., Bruley, J., Coffin, J., Falcon, D., Flaitz, P., Klymko, N., McMurray, J., Ronsheim, P., Wildman, H., …

Electrochemical Society
4 Conference Proceedings Automatic classification of sulcal regions of the human brain cortex using pattern recognition (Honorable Mention Poster)

Behnke, K.J., Rettmann, M.E., Pham, D.L., Shen, D., Resnick, S.M., Davatzikos, C., Prince, J.L.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Automatic macro inspection system

Kitamura,T., Nakajima,Y., Matsumoto,H., Oomori,T., Komatsu,K.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Cavity QED with quantum dots in semiconductor microcavities

M. T. Rakher, S. Strauf, Y. Choi, N. G. Stolz, K. J. Hennessey, H. Kim, A. Badolato, L. A. Coldren, E. L. Hu, P. M. …

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Automatic classification of bottles in crates

K. Aas, L. Eikvil, D. Bremnes, A. Norbryhn

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Integration of the APC framework with AMD's Fab25 factory system

Bushman,S., Campbell,J., Miller,M.L.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Characterization of a fully depleted CCD on high-resistivity silicon

Stover,R.J., Wei,M., Lee,Y., Gilmore,D.K., Holland,S.E., Groom,D.E., Moses,W.W., Perlmutter,S., Goldhaber,G., …

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12