Blank Cover Image

Characterization of interfacial layers and surface roughness using spectroscopic reflectance, spectroscopic ellipsometry, and atomic force microscopy

Author(s):
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. Year:
2002
Vol.:
Part Two
Page(from):
756
Page(to):
764
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Depth profile characterization of hydrogen implanted silicon using spectroscopic ellipsometry

Gubiotti, T., Jacy, D., Hoobler, R.J.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Characterization of Interphase Regions Using Atomic Force Microscopy

Vanlandingham, M. R., McKnight, S. H., Palmese, G. R., Bogetti, T. A., Eduljee, R. F., Gillespie, J. W., Jr.

MRS - Materials Research Society
2 Conference Proceedings Spectroscopic ellipsometry characterization of the interfacial roughness in SIMOX wafer

Li, W.J., Song, Z.R., Tao, K., Yu, Y.H., Wang, X., Zou, S.C.

Electrochemical Society
8 Conference Proceedings Comparison between the atomic force microscopy and x-ray reflectivity on the characterization of the roughness of a surface

Su, H.-C., Lin, M.-Z., Huang, T.-W., Lee, C.-H.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Surface Roughness Characterization of Au Thin Films by Spectroscopic Ellipsometry, Grazing X-ray Reflectance, Light Scattering and Scanning Tunneling Microscopy

Boher, P., Stehle, J. L.

MRS - Materials Research Society
9 Conference Proceedings CHARACTERIZATION OF ION-IMPLANTED ALUMINUM AND IRON BY SPECTROSCOPIC ELLIPSOMETRY

Brodkin, J.S., Franzen, W., Culbertson, R.J., Williams, J.M.

Materials Research Society
4 Conference Proceedings SURFACE ROUGHNESS CHARACTERIZATION OF Al FILMS BY SPECTROSCOPIC ELLIPSOMETRY

Blanco, J.R., Vedam, K., McMarr, P.J., Bennett, J.M.

Materials Research Society
10 Conference Proceedings Imaging microtubules in buffer solution using tapping mode atomic force microscopy

M. Fritz, M. Radmacher, M.W. Allersma, J.P. Cleveland, R.J. Stewart

Society of Photo-optical Instrumentation Engineers
5 Conference Proceedings Roughness Evolution of High-Rate Deposited a-SiNx:H Films Studied by Atomic Force Microscopy and Real Time Spectroscopic Ellipsometry

Oever, P.J.van den, Sanden, M.C.M.van de, Kessels, W.M.M.

Materials Research Society
11 Conference Proceedings Toward accurate linewidth metrology using atomic force microscopy and tip characterization

Dixson,R., Schneir,J., McWaid,T.H., Sullivan,N.T., Tsai,V.W., Zaidi,S.H., Brueck,S.R.J.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings STUDY OF SILICON SURFACE ROUGHNESS BY ATOMIC FORCE MICROSCOPY

Gilicinski, Andrew G., Rynders, Rebecca M., Beck, Scott E., Strausser, Yale E., Stets, James R., Felker, Brian S., …

MRS - Materials Research Society
12 Conference Proceedings A STUDY OF THE SURFACE TEXTURE OF POLYCRYSTALLINE PHOSPHOR FILMS USING ATOMIC FORCE MICROSCOPY

Revay, R., Schneir, J., Brower, D., Villarrubia, J., Fu, J., Cline, J., Hsieh, T. J., Wong-Ng, W.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12