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Low-voltage CD-SEM applications in MEMS devices

Author(s):
Redmond, S. ( Hewlett-Packard Co. (USA) )
Mckay, R.
Mellard, M.
Norris, C.
Wonnacott, J.
Mastovich, M.E. ( Schlumberger Semiconductor Solutions (USA) )
1 more
Publication title:
Metrology, Inspection, and Process Control for Microlithography XVI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4689
Pub. Year:
2002
Vol.:
Part One
Page(from):
604
Page(to):
615
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444356 [0819444359]
Language:
English
Call no.:
P63600/4689
Type:
Conference Proceedings

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