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Laser plasma radiation sources based on a laser-irradiated gas puff target for x-ray and EUV lithography technologies

Author(s):
Fiedorowicz, H. ( Military Univ. of Technology (Poland) )
Bartnik, A.
Jarocki, R.
Kostecki, J.
Rakowski, R.
Szczurek, M.
1 more
Publication title:
Emerging Lithographic Technologies VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4688
Pub. Year:
2002
Vol.:
Part Two
Page(from):
619
Page(to):
625
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
Language:
English
Call no.:
P63600/4688
Type:
Conference Proceedings

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