Characterization and characteristics of a ULE glass tailored for EUVL needs
- Author(s):
- Hrdina, K.E. ( Corning Inc. (USA) )
- Hanson, B.Z.
- Fenn, P.M.
- Sabia, R.
- Publication title:
- Emerging Lithographic Technologies VI
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4688
- Pub. Year:
- 2002
- Vol.:
- Part One
- Page(from):
- 454
- Page(to):
- 461
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819444349 [0819444340]
- Language:
- English
- Call no.:
- P63600/4688
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Lithographic characterization of improved projection optics in the EUVL engineering test stand
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Corning 7972 ULE material for segmented and large monolithic mirror blanks [6273-02]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Mechanical Properties and Filler Distribution as a Function of Filler Content in Silica Filled PDMS Samples
Materials Research Society |