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High-resolution templates for step and flash imprint lithography

Author(s):
Resnick, D.J. ( Motorola (USA) )
Dauksher, W.J.
Mancini, D.P.
Nordquist, K.J.
Ainley, E.S.
Gehoski, K.A.
Baker, J.H.
Bailey, T.C. ( Univ. of Texas at Austin (USA) )
Choi, B.J.
Johnson, S.
Sreenivasan, S.V.
Ekerdt, J.G.
Willson, C.G.
8 more
Publication title:
Emerging Lithographic Technologies VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4688
Pub. Year:
2002
Vol.:
Part One
Page(from):
205
Page(to):
213
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
Language:
English
Call no.:
P63600/4688
Type:
Conference Proceedings

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