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Fabrication challenges for next-generation devices: MEMS for rf wireless communications (Invited Paper)

Author(s):
Seeger, D.E. ( IMB Thomas J. Watson Research Ctr. (USA) )
Lund, J.
Jahnes, C.
Deligianni, L.
Buchwalter, P.
Andricacos, P.C.
Acosta, R.E.
Babich, I.V.
Mahorowala, A.P.
Rosner, J.
Cotte, J.
6 more
Publication title:
Emerging Lithographic Technologies VI
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4688
Pub. Year:
2002
Vol.:
Part One
Page(from):
36
Page(to):
51
Pages:
16
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444349 [0819444340]
Language:
English
Call no.:
P63600/4688
Type:
Conference Proceedings

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