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Excimer-laser-induced photochemical polishing of SiC mirror

Author(s):
Murahara, M.M. ( Tokai Univ. (Japan) )  
Publication title:
Laser-Induced Damage in Optical Materials: 2001
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4679
Pub. Year:
2002
Page(from):
69
Page(to):
74
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819444189 [0819444189]
Language:
English
Call no.:
P63600/4679
Type:
Conference Proceedings

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