Processing of silicon by Nd:YAG lasers with harmonics generation
- Author(s):
- Panzner, M. ( Fraunhofer Institute of Material and Beam Technology (Germany) )
- Kasper, J.
- Wust, H.
- Klotzbach, U.
- Beyer, E.
- Publication title:
- Photon Processing in Microelectronics and Photonics
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4637
- Pub. Year:
- 2002
- Page(from):
- 496
- Page(to):
- 504
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443762 [081944376X]
- Language:
- English
- Call no.:
- P63600/4637
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Comparison of new generation lasers: MOPA-CuBr laser and Nd:YAG laser used for precision processing of the materials
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Ablation rate of the human cornea and PMMA with fifth harmonic generation of Nd:YAG laser (213-nm)
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Intracavity second harmonic generation in passively Q-switched Nd:YAG laser
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Generation of UV laser by Raman shifters in D2 and D2/He pumped by the fourth harmonic Nd:YAG laser for SO2 measurements
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
Polymer-coated silver hollow glass waveguides for delivery of first and second harmonic Nd:YAG laser picosecond pulses
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
A Study on the Characteristics of the Polycrystalline Silicon Annealed by the SHG Nd:YAG Laser
Trans Tech Publications |