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TEM investigations of thermal effects on material structure induced by femtosecond and nanosecond laser processing

Author(s):
Le Harzic, R. ( Univ. Jean Monnet (France) )
Valette, S. ( Ecole Nationale Superieure des Mines de St-Etienne (France) )
Huot, N. ( Univ. Jean Monnet (France) )
Audouard, E.
Baubeau, E.
Jonin, C.
Laporte, P.
2 more
Publication title:
Photon Processing in Microelectronics and Photonics
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4637
Pub. Year:
2002
Page(from):
148
Page(to):
158
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443762 [081944376X]
Language:
English
Call no.:
P63600/4637
Type:
Conference Proceedings

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