Laser ablation of nitrogen-solid films by UV ps-laser irradiation: surface modification of materials by fragments in laser ablation plume (Invited Paper)

Laser ablation of nitrogen-solid films by UV ps-laser irradiation: surface modification of materials by fragments in laser ablation plume (Invited Paper)

Author(s):

Niino, H. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Sato, T.
Narazaki, A.
Kawaguchi, Y.
Yabe, A.

Publication title:

Photon Processing in Microelectronics and Photonics

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4637

Pub. Year:

2002

Page(from):

135

Page(to):

147

Pages:

13

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443762 [081944376X]

Language:

English

Call no.:

P63600/4637

Type:

Conference Proceedings

Details

TDL ID:	ZA00012465
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Photon processing in microelectronics and photonics
Conf. info. (Number):	2002
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2002.01.21-2002.01.24

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