General concept of a surface microgeometry reconstruction based on laser technology (Invited Paper)

General concept of a surface microgeometry reconstruction based on laser technology (Invited Paper)

Author(s):: Veiko, V.P. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )
Publication title:: Photon Processing in Microelectronics and Photonics
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4637
Pub. Year:: 2002
Page(from):: 64
Page(to):: 74
Pages:: 11
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819443762 [081944376X]
Language:: English
Call no.:: P63600/4637
Type:: Conference Proceedings

Details

TDL ID:	ZA00012465
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Photon processing in microelectronics and photonics
Conf. info. (Number):	2002
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2002.01.21-2002.01.24

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