Statistical analysis in MRSM approach of computing and experimental results for integrated circuit technology

Statistical analysis in MRSM approach of computing and experimental results for integrated circuit technology

Author(s):

Kouleshoft, A.A. ( Belorussian State Univ. )
Kuzmicz, W.B. ( Warsaw Univ. of Technology(Poland) )
Malyshev, V.S. ( Belmicrosystems(Belarus) )
Nelayev, V.V. ( Belorussian State Univ. of Informatics and Radioelectronics )
Stempitsky, V.R.

Publication title:

Fifth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4627

Pub. Year:

2002

Page(from):

297

Page(to):

305

Pages:

9

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443663 [0819443662]

Language:

English

Call no.:

P63600/4627

Type:

Conference Proceedings

Details

TDL ID:	ZA00012455
Series ID:	PA00000029
Conf. info. (Name):	International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering
Conf. info. (Number):	2001 : 5th
Conf. info. (Venue):	St. Petersburg, Russia
Conf. info. (Date):	2001.06.12-2001.06.17

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