Nanostructures and biology: some introductory remarks
- Author(s):
- Postek, M.T., Jr. ( National Institute of Standards and Technology (USA) )
- Peckerar, M.C. ( Naval Research Lab. (USA) )
- Publication title:
- Nanostructure Science, Metrology, and Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4608
- Pub. Year:
- 2002
- Page(from):
- 229
- Page(to):
- 229
- Pages:
- 1
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443472 [0819443476]
- Language:
- English
- Call no.:
- P63600/4608
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Nanometer-scale metrology: meeting the nanotechnology measurement challenges
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
High-accuracy critical-dimension metrology using a scanning electron microscope
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
ESA Publications Division |
SPIE-The International Society for Optical Engineering |
ESA Publications Division |
4
Conference Proceedings
Potentials for inspection and metrology of MEMS using a combined scanning electron microscope (SEM) and proximal probe microscope (PPM) (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
Plenum Press |
11
Conference Proceedings
Design and development of a measurement and control system for measuring SEM magnification calibration samples
SPIE-The International Society for Optical Engineering |
Kluwer Academic Publishers |
SPIE-The International Society for Optical Engineering |