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New methods for fabricating step and flash imprint lithography templates

Author(s):
Resnick, D.J. ( Motorola (USA) )
Bailey, T.C. ( Univ. of Texas at Austin (USA) )
Mancini, D.P. ( Motorola (USA) )
Nordquist, K.J.
Dauksher, W.J.
Ainley, E.S.
Talin, A.
Gehoski, K.A.
Baker, J.H.
Choi, B.J. ( Univ. of Texas at Austin (USA) )
Johnson, S.
Colburn, M.
Meissl, M.J.
Sreenivasan, S.V.
Ekerdt, J.G.
Willson, C.G.
11 more
Publication title:
Nanostructure Science, Metrology, and Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4608
Pub. Year:
2002
Page(from):
176
Page(to):
181
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443472 [0819443476]
Language:
English
Call no.:
P63600/4608
Type:
Conference Proceedings

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