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Nanometer-scale metrology: meeting the nanotechnology measurement challenges

Author(s):
Postek, M.T., Jr. ( National Institute of Standards and Technology (USA) )  
Publication title:
Nanostructure Science, Metrology, and Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4608
Pub. Year:
2002
Page(from):
102
Page(to):
111
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443472 [0819443476]
Language:
English
Call no.:
P63600/4608
Type:
Conference Proceedings

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