Blank Cover Image

Nanoscience: a new thrust for science in the 21st century?

Author(s):
Peckerar, M.C. ( Naval Research Lab. (USA) )  
Publication title:
Nanostructure Science, Metrology, and Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4608
Pub. Year:
2002
Page(from):
1
Page(to):
18
Pages:
18
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443472 [0819443476]
Language:
English
Call no.:
P63600/4608
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Pattern-density-dependent contrast in commonly used dose-equalization schemes

Peckerar,M.C., Marrian,C.R.K.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Semiconductor Analysis And the 21st Century Fab

Dziobkowski, C., Bruley, J., Coffin, J., Falcon, D., Flaitz, P., Klymko, N., McMurray, J., Ronsheim, P., Wildman, H., …

Electrochemical Society
2 Conference Proceedings Error measure comparison of currently employed dose-modulation schemes for e-beam proximity effect control

M.C. Peckerar, C.R.K. Marrian

Society of Photo-optical Instrumentation Engineers
8 Conference Proceedings Position measurement of high-energy e-beams for pattern placement improvement

Perkins,F.K., McCarthy,D., Marrian,C.R.K., Peckerar,M.C.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Proximity correction for e-beam lithography

Marrian,C.R., Chang,S., Peckerar,M.C.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Improved pattern placement in membrane mask making

Perkins,F.K., Marrian,C.R.K., Peckerar,M.C.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Nanostructures and biology: some introductory remarks

Postek, M.T., Jr., Peckerar, M.C.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Sensing macromolecules with microelectronics

Perkins, F.K., Tender, L.M., Fertig, S.J., Peckerar, M.C.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Proposal solicitation and selection for the 21st century

Moller,P., Miller,G.E., Blacker,B.S., Urry,C.M.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Resin Distribution in the 21Century

Baumann H. M., Jones J. R.

Society of Plastics Engineers, Inc. (SPE)
6 Conference Proceedings SELECTIVE METALLIZATION OF DIAMOND FILMS

Pehrsson, P.E., Calvert, J.M., Peckerar, M.C., Dulcey, C.S.

Electrochemical Society
12 Conference Proceedings Molecular Imaging and Therapy: New Paradigms for 21st Century Medicine

Lanza, G. M., Winter, P. M., Hughes, M. S., Caruthers, S. D., Marsh, J. N., Morawski, A. M., Schmieder, A. H., Scott, M. …

American Chemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12