Microsensors and actuator arrays based on Pb(Zr,Ti) O3 thin film for AFM data storage
- Author(s):
Chu, J. ( Univ. of Science and Technology of China (China) ) Lu, J. Wu, Y. Huang, W. Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) ) Itoh, T. ( Univ. of Tokyo (Japan) ) Suga, T. - Publication title:
- Micromachining and Microfabrication Process Technology and Devices
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4601
- Pub. Year:
- 2001
- Page(from):
- 379
- Page(to):
- 383
- Pages:
- 5
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443403 [0819443409]
- Language:
- English
- Call no.:
- P63600/4601
- Type:
- Conference Proceedings
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