Novel silicon-micromachined gyroscope with high Q at atmosphere

Novel silicon-micromachined gyroscope with high Q at atmosphere

Author(s):

Xiong, B. ( Shanghai Institute of Metallurgy (China) )
Wang, Y.
Che, L.
Wang, W.

Publication title:

Micromachining and Microfabrication Process Technology and Devices

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4601

Pub. Year:

2001

Page(from):

38

Page(to):

42

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443403 [0819443409]

Language:

English

Call no.:

P63600/4601

Type:

Conference Proceedings

Details

TDL ID:	ZA00012429
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and microfabrication process technology and devices
Conf. info. (Number):	2001
Conf. info. (Venue):	Nanjing, China
Conf. info. (Date):	2001.11.07-2001.11.09

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