Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography

Fabrication of submicron-sized structures on hybrid sol-gel glass with electron-beam lithography

Author(s):

Jiang, H.J. ( Nanyang Technological Univ. (Singapore) )
Yuan, X.-C.
Cheong, W.C.

Publication title:

Design, fabrication, and characterization of photonic devices : 27-30 November 2001, Singapore

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4594

Pub. Year:

2001

Page(from):

104

Page(to):

109

Pages:

6

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819443243 [0819443247]

Language:

English

Call no.:

P63600/4594

Type:

Conference Proceedings

Details

TDL ID:	ZA00012422
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Photonics and Applications : Design, fabrication, and characterization of photonic devices
Conf. info. (Number):	2001
Conf. info. (Venue):	Singapore
Conf. info. (Date):	2001.11.27-2001.11.30

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