Blank Cover Image

Single-crystal silicon MEMS microactuator for high-density hard disk drive

Author(s):
Publication title:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4592
Pub. Year:
2001
Page(from):
443
Page(to):
449
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443229 [0819443220]
Language:
English
Call no.:
P63600/4592
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Dynamics simulation of MEMS device embedded-hard-disk-drive system

Yang, J., Chai, J., Lim, B.B., Chen, S.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Single-crystal silicon gyroscope with decoupled drive and sense

Adams,S.G., Groves,J., Shaw,K.A., Davis,T.J., Cardarelli,D., Carroll,R., Walsh,J., Fontanella,M.D.

SPIE - The International Society for Optical Engineering
2 Conference Proceedings Microactuators for Precise Head Positioning in Hard Disk Drives

Iinamura, T., Koganezawa, S., Uematsu, Y.

Electrochemical Society
8 Conference Proceedings Analysis of thermal stress damage in single-crystal silicon induced by 1064-nm long-pulse laser

Y. Chen, J. Lu, X. Ni

Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Experimental Characterization Techniques for High Performance Hard Disk Drive Ball Bearing Spindle Motors

Andrew Chong, Lu Yi, S. X. Chen, Q. D. Zhang

American Society of Mechanical Engineers
9 Conference Proceedings Large-displacement microactuators in deep reactive ion-etched single-crystal silicon

Smith,G.L., Maloney,J.M., Fan,L., DeVoe,D.L.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Single-crystal disk drive miniactuators

Giovanardi,M., McKenney,K., Rule,J.A., Yoshikawa,S.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Small Actuator for Large Capacity. A MEMS Microactautor for Hard-Disk Drive Tracking Servo

Hirano, T., Pattanaik, H.Yang.S., White, M., Araya, S.

Electrochemical Society
5 Conference Proceedings High-bandwidth macro/microactuation for hard-disk drive

Ma,J., Ang Jr.,M.H.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Designing the drive scheme of the silicon-based MEMS torsion-mirror optical switch

Yin, D., Lin, J., Chen, Q., Chen, Z., Xu, A., Wu, W.

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Evaluation of micromechanical reliability of microactuator materials for hard-disk drive using the electrostatic test structure

Lee,S.-H., Pak,Y., Kwon,D.

SPIE - The International Society for Optical Engineering
12 Conference Proceedings Vibration Analysis of the Hard Disk Drive System

Chun,S.B., Lee,C.W.

Society for Experimental Mechanics
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12