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LIGA fabrication of high-aspect-ratio lobster-eye optics

Author(s):
Peele, A.G. ( Univ. of Melbourne (Australia) )
Irving, T.H.K.
Nugent, K.A.
Mancini, D.C. ( Argonne National Lab. (USA) )
Moldovan, N.A.
Christenson, T.R. ( Sandia National Labs. (USA) )
1 more
Publication title:
Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4592
Pub. Year:
2001
Page(from):
406
Page(to):
413
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819443229 [0819443220]
Language:
English
Call no.:
P63600/4592
Type:
Conference Proceedings

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