Enabling MEMS technologies for communications systems (Invited Paper)
- Author(s):
- Lubecke, V.M. ( Lucent Technologies/Bell Labs. (USA) )
- Barber, B.P. ( Agere Systems (USA) )
- Arney, S. ( Lucent Technologies/Bell Labs.(USA) )
- Publication title:
- Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4592
- Pub. Year:
- 2001
- Page(from):
- 257
- Page(to):
- 266
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819443229 [0819443220]
- Language:
- English
- Call no.:
- P63600/4592
- Type:
- Conference Proceedings
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