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The influence of microelectronic processing steps on the properties of porous silicon layers

Author(s):
Munder,H.
Berger,M.G.
Frohnhoff,St.
Thonissen,M.
Luth,H.
Theiβ,W.
Kupper,L.
2 more
Publication title:
Optical properties of low dimensional silicon structures
Title of ser.:
NATO ASI series. Series E, Applied sciences
Ser. no.:
244
Pub. Year:
1993
Page(from):
75
Page(to):
80
Pages:
6
Pub. info.:
Dordrecht: Kluwer Academic Publishers
ISSN:
0168132X
ISBN:
9780792324461 [0792324463]
Language:
English
Call no.:
N11482/244
Type:
Conference Proceedings

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