Auto-alignment for incident angle of ellipsometer

Auto-alignment for incident angle of ellipsometer

Author(s):

Park,S.L. ( Korea Advanced Institute of Science and Technology )
Jung,J.
Seo,J.W.
Kang,D.K.
Gweon,D.G.

Publication title:

Optomechatronic systems II : 29-31 October 2001, Newton, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4564

Pub. Year:

2001

Page(from):

339

Page(to):

347

Pages:

9

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442925 [0819442925]

Language:

English

Call no.:

P63600/4564

Type:

Conference Proceedings

Details

TDL ID:	ZA00012278
Series ID:	PA00000029
Conf. info. (Name):	Photonics East : Optomechatronic systems
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	Newton, MA, USA
Conf. info. (Date):	2001.10.29-2001.10.31

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