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Improvement of alt-PSM production process using backside phase-measurement method

Author(s):
Saitou,H. ( Dai Nippon Printing Co., Ltd. )
Koizumi,Y.
Sanki,S.
Kamibayashi,T.
Murai,S.M.
Miyashita,H.
Fujita,H.
Morikawa,Y.
Nara,M.
Hayashi,N.
Hoga,M.
6 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. Year:
2001
Vol.:
4562
Pt.:
Two of Two Parts
Page(from):
1087
Page(to):
1095
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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