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Optimization of ArF alternating phase-shifting mask structure for 100-nm node and inspection of phase defects

Author(s):
Chiba,K. ( Toppan Printing Co., Ltd. )
Takahashi,H.
Nozaki,W.
Akima,S.
Nagashige,S.
Yamada,Y.
1 more
Publication title:
21st Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562
Pub. Year:
2001
Vol.:
4562
Pt.:
One of Two Parts
Page(from):
430
Page(to):
440
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442901 [0819442909]
Language:
English
Call no.:
P63600/4562
Type:
Conference Proceedings

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