Multibeam high-resolution die-to-database reticle inspection

Multibeam high-resolution die-to-database reticle inspection

Author(s):

Volk,W.W. ( KLA-Tencor Corp. )

Publication title:

21st Annual BACUS Symposium on Photomask Technology

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4562

Pub. Year:

2001

Vol.:

4562

Pt.:

One of Two Parts

Page(from):

111

Page(to):

121

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442901 [0819442909]

Language:

English

Call no.:

P63600/4562

Type:

Conference Proceedings

Details

TDL ID:	ZA00012276
Series ID:	PA00000029
Conf. info. (Name):	SPIE Photomask Technology : Annual BACUS Symposium on Photomask Technology
Conf. info. (Number):	2001 : 21st
Conf. info. (Venue):	Monterey, CA, USA
Conf. info. (Date):	2001.10.03-2001.10.05

Similar Items:

1 Conference Proceedings Multibeam resolution die-to database reticle inspection Volk, W.W., Broadbent, W.H., Garcia, H.I., Waston, S.G., Lim, P.M., Ruch, W.E. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Multibeam high-resolution UV wavelength reticle inspection Hung,C.C., Yoo,C.S., Lin,C.H., Volk,W.W., Wiley,J.N., Khanna,S., Biellak,S., Wang,D. SPIE-The International Society for Optical Engineering
2 Conference Proceedings Energy flux method for die-to-database inspection of critical layer reticles Garcia, H.I., Volk, W.W., Xiong, Y., Watson, S.G., Yu, Z., Guo, Z., Wang, L. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Multibeam high-resolution UV wavelength reticle inspection Hung,C.C., Yoo,C.S., Lin,C.-H., Volk,W.W., Wiley,J.N., Khanna,S., Biellak,S., Wang,D. SPIE-The International Society for Optical Engineering
3 Conference Proceedings New energy flux method for inspection of contact layer reticles Volk, W.W., Garcia, H.I., Becker, C., Chen, G., Watson, S.G. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Results from a new reticle defect inspection platform Broadbent, W.H., Wiley, J.N., Saidin, Z.K., Watson, S.G., Alles, D.S., Zurbrick, L.S., Mack, C.A. SPIE - The International Society of Optical Engineering
4 Conference Proceedings Energy flux method for inspection of contact and VIA layer reticles Garcia, H.I., Volk, W.W., Xiong, Y., Watson, S.G., Yu, Z., Guo, Z., Wang, L. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Extending TeraStar reticle inspection capability to the 90nm node through layer-specific algorithms Rudzinski, M.W., Garcia, H.I., Volk, W.W., Wang, L. SPIE-The International Society for Optical Engineering
5 Conference Proceedings New die-to-database inspection algorithm for inspection of 90-nm node reticles Garcia, H.I., Volk, W.W., Watson, S., Hess, C., Aquino, C., Wiley, J., Mack, C.A. SPIE-The International Society for Optical Engineering	11 Conference Proceedings High-resolution UV wavelength reticle contamination inspection Franklin D. Kalk, William W. Volk, James N. Wiley, Ed Hou, Sterling G. Watson SPIE - The International Society of Optical Engineering
6 Conference Proceedings Results from a new die-to-database reticle inspection platform Broadbent, W.H., Wiley, J.N., Saidin, Z.K., Watson, S.G., Alles, D.S., Zurbrick, L.S., Mack, C.A. SPIE - The International Society of Optical Engineering	12 Conference Proceedings High-resolution UV wavelength reticle contamination inspection Kalk, F. D., Volk, W., Wiley, J. N., Hou, E., Watson, S. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12