Development of optical MEMS carbon dioxide sensors
- Author(s):
Moelders,N. ( Ion Optics, Inc. ) McNeal,M.P. Pralle,M.U. Last,L. Ho,W. Greenwald,A.C. Daly,J.T. Johnson,E.A. George,T. Choi,D.S. - Publication title:
- MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4561
- Pub. Year:
- 2001
- Page(from):
- 305
- Page(to):
- 314
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442895 [0819442895]
- Language:
- English
- Call no.:
- P63600/4561
- Type:
- Conference Proceedings
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