Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism

Flip-chip fabrication of integrated micromirror arrays using a novel latching off-chip hinge mechanism

Author(s):

Michalicek,M.A. ( Univ. of Colorado/Boulder )
Bright,V.M.

Publication title:

MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4561

Pub. Year:

2001

Page(from):

209

Page(to):

220

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819442895 [0819442895]

Language:

English

Call no.:

P63600/4561

Type:

Conference Proceedings

Details

TDL ID:	ZA00012275
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MOEMS and Miniaturized Systems
Conf. info. (Number):	2001 : 2nd
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.10.22-2001.10.24

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