Blank Cover Image

Design optimization of an electrostatically driven micro scanning mirror

Author(s):
Publication title:
MOEMS and Miniaturized systems II : 22-24 October 2001, San Francisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4561
Pub. Year:
2001
Page(from):
35
Page(to):
44
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442895 [0819442895]
Language:
English
Call no.:
P63600/4561
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror

Wolter, A., Schenk, H., Korth, H., Lakner, H.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Design and modeling of large deflection micromechanical 1D and 2D scanning mirrors

Schenk,H., Durr,P., Kunze,D., Lakner,H., Kuck,H.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Fabrication end-test of the micro scanning mirror

Wolter, A., Gaumont, E., Korth, H., Schenk, H., Lakner, H. K.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Low-cost projection device with a 2D resonant microscanning mirror

Roscher, K.-U., Graetz, H., Schenk, H., Wolter, A., Lakner, H.

SPIE - The International Society of Optical Engineering
3 Conference Proceedings Improved layout for a resonant 2D micro scanning mirror with low operation voltages

Wolter, A., Schenk, H., Gaumont, E., Lakner, H.K.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Scanning 2D micromirror with enhanced flatness at high frequency [6114-24]

Wolter, A., Klose, T., Hsu, S.-T., Schenk, H., Lakner, H.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Damping analysis and measurement for a comb-drive scanning mirror

Sandner, T., Klose, T., Wolter, A., Schenk, H., Lakner, H. K., Davis, W.

SPIE - The International Society of Optical Engineering
10 Conference Proceedings Ultra compact laser projection systems based on two-dimensional resonant micro scanning mirrors

M. Scholles, A. Braeuer, K. Frommhagen, Ch. Gerwig, H. Lakner, H. Schenk, M. Schwarzenberg

SPIE - The International Society of Optical Engineering
5 Conference Proceedings MEMS microscanning mirror for barcode reading: from development to production

Wolter, A., Schenk, H., Gaumont, E., Lakner, H.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Realization of a spectrometer with micromachined scanning grating

Grueger, H., Wolter, A., Schuster, T., Schenk, H., Lakner, H.K.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Applications and requirements for MEMS scanner mirrors

Wolter, A., Hsu, S.-T., Schenk, H., Lakner, H.K.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings New approach for MEMS scanning mirror for laser projection systems

H. Grüger, J. Knobbe, M. Scholles, H. Schenk, H. Lakner

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12