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Design and simulation of a vacuum micropump

Author(s):
Publication title:
Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4560
Pub. Year:
2001
Page(from):
263
Page(to):
273
Pages:
11
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442888 [0819442887]
Language:
English
Call no.:
P63600/4560
Type:
Conference Proceedings

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