Development of surface micromachining technologies for microfluidics and bioMEMS
- Author(s):
- Okandan,M. ( Sandia National Labs. )
- Galambos,P.
- Mani,S.S.
- Jakubczak,J.F.
- Publication title:
- Microfluidics and bioMEMS : 22-24 October 2001, San Francisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4560
- Pub. Year:
- 2001
- Page(from):
- 133
- Page(to):
- 139
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442888 [0819442887]
- Language:
- English
- Call no.:
- P63600/4560
- Type:
- Conference Proceedings
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