Laser micromachining for manufacturing MEMS devices

Laser micromachining for manufacturing MEMS devices

Author(s):: Gower,M.C. ( Exitech Ltd. )
Publication title:: MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 4559
Pub. Year:: 2001
Page(from):: 53
Page(to):: 59
Pages:: 7
Pub. info.:: Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819442871 [0819442879]
Language:: English
Call no.:: P63600/4559
Type:: Conference Proceedings

Details

TDL ID:	ZA00012273
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication
Conf. info. (Number):	2001
Conf. info. (Venue):	San Francisco, CA, USA
Conf. info. (Date):	2001.01.22-2001.01.23

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