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Single-layer silicon-on-insulator MEMS gyroscope for wide dynamic range and harsh environment applications

Author(s):
Kranz,M.S. ( Morgan Research Corp. )
Hudson,T.D.
Ashley,P.R.
Ruffin,P.B.
Burgett,S.J.
Temmen,M.
Tuck,J.
2 more
Publication title:
MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4559
Pub. Year:
2001
Page(from):
5
Page(to):
16
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442871 [0819442879]
Language:
English
Call no.:
P63600/4559
Type:
Conference Proceedings

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