Parametric monitoring for the SUMMiT V surface-micromachining process
- Author(s):
Oliver,A.D. ( Sandia National Labs. ) Tanner,D.M. Mani,S.S. Swanson,S.E. Helgesen,K.S. Smith,N.F. - Publication title:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4558
- Pub. Year:
- 2001
- Page(from):
- 242
- Page(to):
- 253
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- Language:
- English
- Call no.:
- P63600/4558
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Development of surface micromachining technologies for microfluidics and bioMEMS
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Anodic oxidation-induced delamination of the SUMMiT poly 0 to Silicon Nitride Interface
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
4
Conference Proceedings
Linkage design effect on the reliability of surface-micromachined microengines driving a load
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
First reliability test of a surface-micromachined microengine using SHiMMeR
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
SPIE - The International Society for Optical Engineering |
12
Conference Proceedings
Enhanced protein binding on a surface plasmon resonance sensor using a plasma-deposited functionalization film
Society of Photo-optical Instrumentation Engineers |