Reliability of micro-electro-mechanical systems (MEMS)
- Author(s):
- Tadigadapa,S. ( The Pennsylvania State Univ. )
- Najafi,N.
- Publication title:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4558
- Pub. Year:
- 2001
- Page(from):
- 197
- Page(to):
- 205
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- Language:
- English
- Call no.:
- P63600/4558
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
MEMS(micro-electro-mechanical systems)technology:an overview and SCL's role
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
2
Conference Proceedings
Development of characterization tools for reliability testing of micro-electro-mechanical system actuators
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Solder bonding for microelectricalmechanical systems (MEMS) applications (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Efficient reduced order modeling for system simulation of micro-electro-mechanical systems(MEMS)from FEM models
SPIE - The International Society for Optical Engineering |
American Society of Mechanical Engineers |
10
Conference Proceedings
Micro-electro-mechanical-system(MEMS)-based fiber optic grating sensor for improving weapon stabilization and fire control
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Failure analysis of radio frequency (rf) micro-electro-mechanical systems (MEMS)
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Micro-electro-mechanical system(MEMS)-based fiber optic sensor and sensor network for improving weapon stabilization and fire control
SPIE - The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
12
Conference Proceedings
Integrated multidisciplinary CAD/CAE environment for micro-electro-mechanical systems(MEMS)
SPIE - The International Society for Optical Engineering |