Characterization of an inchworm actuator fabricated by polysilicon surface micromachining
- Author(s):
- Boer,M.P.de ( Sandia National Labs. )
- Luck,D.L.
- Walraven,J.A.
- Redmond,J.M.
- Publication title:
- Reliability, testing, and characterization of MEMS/MOEMS : 22-24 October 2001, San Trancisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4558
- Pub. Year:
- 2001
- Page(from):
- 169
- Page(to):
- 180
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442864 [0819442860]
- Language:
- English
- Call no.:
- P63600/4558
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Frequency response of an inchworm motor fabricated with micromachined interlocking surface mesoscale actuator device (MAD)
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)
SPIE-The International Society for Optical Engineering |
MRS-Materials Research Society |
SPIE-The International Society for Optical Engineering |
3
Conference Proceedings
Static and dynamic characterization of polysilicon surface-micromachined actuators
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Characterization of MEMS microgears rotating up to 360,000 rpm by stroboscopic optoelectronic laser interferometry microscope(SOELIM)methodology
SPIE - The International Society for Optical Engineering |
4
Conference Proceedings
A hinged-pad test structure for sliding friction measurement in micromachining
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Surface characterization and adhesion analysis for polysilicon micromachined flaps
SPIE-The International Society for Optical Engineering |
5
Conference Proceedings
Interferometric measurement for improved understanding of boundary effects in micromachined beams
SPIE - The International Society for Optical Engineering |
11
Conference Proceedings
Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |