Conformal deposition of LPCVD TEOS
- Author(s):
- McCann,P. ( Analog Devices Belfast )
- Somasundram,K.
- Byrne,S.
- Nevin,A.
- Publication title:
- Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4557
- Pub. Year:
- 2001
- Page(from):
- 329
- Page(to):
- 340
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442857 [0819442852]
- Language:
- English
- Call no.:
- P63600/4557
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Factors Affecting Stress-Induced Defect Generation in Trenched SOI for High-Voltage Applications
Electrochemical Society |
7
Conference Proceedings
Effect of Material Properties on Stress-Induced Defect Generation in Trench SOI
Electrochemical Society |
Electrochemical Society |
8
Conference Proceedings
Effect of Material Properties on Stress-Induced Defect Generation in Trench SOI
Electrochemical Society, SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Electrical and Structural Characterization of Silicon on Silicon Bonded Interfaces
Electrochemical Society |
SPIE-The International Society for Optical Engineering |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |