Fabrication of the refined MEMS-based compound grating (MCG) based on silicon micromachining
- Author(s):
- Yao,Y. ( Intpax, Inc. )
- Xu,B.
- Castracane,J.
- Publication title:
- Micromachining and microfabrication process technology VII : 22-24 October 2001, San Francisco, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4557
- Pub. Year:
- 2001
- Page(from):
- 31
- Page(to):
- 39
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442857 [0819442852]
- Language:
- English
- Call no.:
- P63600/4557
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Component development and integration issues for bio/chemometric appliations of VCSEL and MOEMS arrays
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Analysis and testing of an optical add/drop multiplexer based on MEMS micro-actuators
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Fabrication of MEMS Devices with Macroporous Silicon Membrane Embedded With Modulated 3D Structures for Optimal Cell Sorting
Materials Research Society |
4
Conference Proceedings
Novel design and fabrication of a microcentrifuge for biomedical and biochemical applications
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Fabrication of Flexible One-Dimensional Porous Silicon Photonic Band-Gap Structures
Materials Research Society |
SPIE-The International Society for Optical Engineering |
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |