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Experiment and simulation study of instability of a novel electrostatic MEMS relay

Author(s):
Publication title:
Third International Conference on Experimental Mechanics : 15-17 October, 2001, Beijing China
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4537
Pub. Year:
2001
Page(from):
430
Page(to):
433
Pages:
4
Pub. info.:
Bellingham, Washington: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442611 [0819442615]
Language:
English
Call no.:
P63600/4537
Type:
Conference Proceedings

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