Silicon micromechanical sensors model of piezoresistivity
- Author(s):
- Lysko,J.M. ( Institute of Electron Technology )
- Publication title:
- Optoelectronic and Electronic Sensors IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4516
- Pub. Year:
- 2000
- Page(from):
- 1
- Page(to):
- 9
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442390 [0819442399]
- Language:
- English
- Call no.:
- P63600/4516
- Type:
- Conference Proceedings
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