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First realization and characterization of multilayer EUV reflective coatings

Author(s):
Nicolosi,P. ( Univ. degli Studi di Padova )
Patelli,A.
Pelizzo,M.G.
Rigato,V.
Maggioni,G.
Depero,L.
Bontempi,E.
Mattei,G.
Poletto,L.
Mazzoldi,P.
Tondello,G.
6 more
Publication title:
Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4506
Pub. Year:
2001
Page(from):
76
Page(to):
83
Pages:
8
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819442208 [0819442208]
Language:
English
Call no.:
P63600/4506
Type:
Conference Proceedings

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