Improved reflectance and stability of Mo/Si multilayers
- Author(s):
Bajt,S. ( Lawrence Livermore National Lab. ) Alameda,J.B. Barbee Jr.,T.W. Clift,W.M. Folta,J.A. Kaufmann,B.B. Spiller,E.A. - Publication title:
- Soft X-ray and EUV imaging systems II : 31 July-1 August 2001, San Diego, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4506
- Pub. Year:
- 2001
- Page(from):
- 65
- Page(to):
- 75
- Pages:
- 11
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819442208 [0819442208]
- Language:
- English
- Call no.:
- P63600/4506
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Lifetime studies of Mo/Si and Mo/Be multilayer coatings for extreme ultraviolet lithography
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Multilayer reflective coatings for extreme-ultraviolet lithography (Invited Paper)
SPIE-The International Society for Optical Engineering |
2
Conference Proceedings
Advances in multilayer reflective coatings for extreme ultraviolet lithography
SPIE - The International Society for Optical Engineering |
8
Conference Proceedings
Interface reaction characterization and interfacial effects in multilayers (Invited Paper)
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
High-precision reflectometry of multilayer coatings for extreme ultraviolet lithography
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
5
Conference Proceedings
High-resolution gamma-ray spectrometers using bulk absorbers coupled to Mo/Cu multilayer superconducting transition-edge sensors
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Experimental investigation of beryllium-based multilayer coatings for extreme ultraviolet lithography
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |